Wet bench process equipment
PRODUCTS INFORMATION

8” WAFERx2cassette Multi-robotic automatic wet bench

DEMO Video
6. Option: HEPA unit
Megasonic cleaner
Quartz inline heater
Recirculation and filteration
Chemical buffer tank and dosing unit
CCD
1. Load(wet in/dry in)
2. SC1,SC2,HF,HCL,BOE
3. QDR,O/F
4. Spin dryer
5. Unload(dry out)