Wet bench process equipment
PRODUCTS INFORMATION

6” WAFERx2cassette /8”x1 cassette manual transfer WET BENCH

1. SC1,SC2,HF,HCL,BOE,SPM Bath
2. QDR,O/F Bath
3. Spin dryer
4. Option: Agitation unit
Wafer Rotating unit
HEPA unit
Ultrasonic cleaner
Quartz inline heater
Recirculation and filteration
Chemical buffer tank and dosing unit