Wet bench process equipment
PRODUCTS INFORMATION

Wet Bench:SC1, SC2, BOE, SPM

1. SC1,SC2,HF,HCL,BOE,SPM Bath
2. QDR,O/F
3. Option: Spin dryer
Agitation unit
Wafer rotating unit
HEPA unit
Ultrasonic cleaner
Quartz inline heater
Recirculation and filteration
Chemical buffer tank and dosing unit
SECS/GEM